Patel says TSMC still uses DUV for seven nanometer despite having fifty EUV tools because DUV proved superior.
“So TSMC, to this day, even though they've been use they have over 50 EUV tools and they make hundreds of thousands of wafers a month with EUV, still uses DUV for their seven nanometer.”
Patel explains TSMC found DUV superior to EUV for seven nanometer on yield, cost, and performance after trying both.
“TSMC tried both. Right? And so at six nanometer and five nanometer, they use EUV, but they think cost efficiency wise, yield, right, which is how good the product's coming out, how many are good, how many need to be thrown away, the yield is better, the cost is better, the performance is better with DUV rather than EUV.”