Patel argues doubling lithography costs only increases total chip cost by 10 percent, enabling five nanometer.
“If seven nanometer was completely economical, five nanometer, if the lithography element costs twice as much with the 1980i versus the next generation lithography tool, then that on the total chip basis doesn't cost anywhere close to that, right? Because again, the manufacturing cost of lithography is only one fourth to one fifth.”
Patel argues the unrestricted 1980i tool can reach five nanometer with only modest cost increases on total chip economics.
“And many folks including, not just myself, but many folks in the industry as well think that the 1980i could be used for five nanometer, right?”
Patel calculates doubling lithography cost only increases total chip cost 10 percent, enabling five nanometer.
“Because again, the manufacturing cost of lithography is only one fourth to one fifth. So if you double lithography costs, you're only increasing the total cost of a chip by 10%, right?”